JPS6420725U - - Google Patents
Info
- Publication number
- JPS6420725U JPS6420725U JP1987113847U JP11384787U JPS6420725U JP S6420725 U JPS6420725 U JP S6420725U JP 1987113847 U JP1987113847 U JP 1987113847U JP 11384787 U JP11384787 U JP 11384787U JP S6420725 U JPS6420725 U JP S6420725U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- chamber
- rotating shaft
- notch
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987113847U JPS6420725U (en]) | 1987-07-27 | 1987-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987113847U JPS6420725U (en]) | 1987-07-27 | 1987-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6420725U true JPS6420725U (en]) | 1989-02-01 |
Family
ID=31354052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987113847U Pending JPS6420725U (en]) | 1987-07-27 | 1987-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6420725U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58100425A (ja) * | 1981-12-11 | 1983-06-15 | Hitachi Ltd | ウエハ両面のレジスト膜均一塗布装置 |
-
1987
- 1987-07-27 JP JP1987113847U patent/JPS6420725U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58100425A (ja) * | 1981-12-11 | 1983-06-15 | Hitachi Ltd | ウエハ両面のレジスト膜均一塗布装置 |